Fluid Handling

metering pump

MicroPump Model 230 series

The RKD Engineering Model 230 series metering pumps are precision, positive displacement pumps designed for dispensing corrosive or high purity liquids. The units are constructed with all PTFE wetted parts with all mechanical components made of corrosion resistant polymers. All internal hardware used in its construction is made of stainless steel. The pump mechanism is enclosed with the electronic and electromechanical components in an air tight all plastic housing. The pumps are pneumatically operated to allow for full isolation of the flow path. The pumps deliver discrete volumes of fluid with the rate of dispense determined by an analog control signal. The dispensing volumes are fixed at 15 to 200 micro liters per dispense step depending on the model.

  • Small footprint
  • Compatible with most process chemicals
  • All PTFE wetted parts with HPLC grade purity
  • Positive pump volume
  • Bidirectional continuous pumping with analog 0 to 10 volt control
  • Fully integrated controls
  • NEMA 4X / IP67 enclosure and connector
    Applications
  • Copper plating
  • CMP
  • Wet clean/etch
  • chemical management systems
  • automatic titration

Model volume flow range inlet pressure outlet pressure
230 20 micro-liters 0 to 10 ml/min +/- 5 PSI 45 PSI max
231 50 micro-liters 0 to 50 ml/min +/- 5 PSI 30 PSI max
232 500 micro-liters 0 to 250 ml/min +/- 5 PSI 20 PSI max


SPECIFICATIONS
CDA pressure 60 to 80 PSI
Controller supply voltage 22 to 26 Volts DC at .35 amps max
Inlet suction self priming to 1.5 meters
Flow accuracy ±2% at viscosity of 1.0
Flow repeatability ±1%
Control accuracy ±2% of set point ± meter volume
Control connector Hirose HR30 10 pin


metering pump diagram

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